Inventor
OSHIMA KATSUO
JP4 patents
⚠️ This page may combine multiple inventors who share the name “OSHIMA KATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKI ELECTRIC IND CO LTD
3 patentsUS6455438B1Sep 24, 2002
Fabrication method for a semiconductor device
OKI ELECTRIC IND CO LTD14 citations80
US6869738B2Mar 22, 2005
Mask pattern correction method
OKI ELECTRIC IND CO LTD9 citations69
US6838643B2Jan 4, 2005
Method and apparatus for performing baking treatment to semiconductor wafer
OKI ELECTRIC IND CO LTD5 citations59