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Inventor
CHO YONGSEOK
KR
2 patents
Patents
2 patents
US11502097B2
Nov 15, 2022
Integrated circuit device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD
0 citations
56
US9601496B2
Mar 21, 2017
Semiconductor device having sacrificial layer pattern with concave sidewalls and method fabricating the same
SAMSUNG ELECTRONICS CO LTD
1 citations
45