Inventor

VAZHAEPARAMBIL JIJEN

US3 patents

Patents

3 patents

US9891177B2Feb 13, 2018

TDI sensor in a darkfield system

KLA TENCOR CORP56 citations96

US9182358B2Nov 10, 2015

Multi-spot defect inspection system

KLA TENCOR CORP1 citations50

US9678350B2Jun 13, 2017

Laser with integrated multi line or scanning beam capability

KLA TENCOR CORP0 citations40