Inventor
LARSON CARL ERIC
US4 patents
Patents
4 patentsUS7288362B2Oct 30, 2007
Immersion topcoat materials with improved performance
IBM11 citations83
US7585609B2Sep 8, 2009
Bilayer film including an underlayer having vertical acid transport properties
IBM5 citations71
US7855045B2Dec 21, 2010
Immersion topcoat materials with improved performance
IBM2 citations61
US7160665B2Jan 9, 2007
Method for employing vertical acid transport for lithographic imaging applications
IBM4 citations60