Inventor

MCINTOSH MONIQUE

US3 patents

Patents

3 patents

US9649592B2May 16, 2017

Plasma abatement of compounds containing heavy atoms

APPLIED MATERIALS INC11 citations82

US11185815B2Nov 30, 2021

Plasma abatement of compounds containing heavy atoms

APPLIED MATERIALS INC1 citations71

US10449486B2Oct 22, 2019

Plasma abatement of compounds containing heavy atoms

APPLIED MATERIALS INC1 citations71