Inventor
FUNATO SATORU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “FUNATO SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CLARIANT FINANCE BVI LTD
4 patentsUS6479210B2Nov 12, 2002
Chemically amplified resist composition
CLARIANT FINANCE BVI LTD77 citations95
US6284427B1Sep 4, 2001
Process for preparing resists
CLARIANT FINANCE BVI LTD18 citations92
US6686121B2Feb 3, 2004
Process for preparing resists
CLARIANT FINANCE BVI LTD6 citations73
US6527966B1Mar 4, 2003
Pattern forming method
CLARIANT FINANCE BVI LTD11 citations73
HOECHST JAPAN
4 patentsUS5738972AApr 14, 1998
Radiation sensitive composition
HOECHST JAPAN21 citations92
US5846690ADec 8, 1998
Radiation-sensitive composition containing plasticizer
HOECHST JAPAN11 citations73
US5773191AJun 30, 1998
Radiation-sensitive composition
HOECHST JAPAN11 citations73
US6110639AAug 29, 2000
Radiation-sensitive composition and recording medium using the same
HOECHST JAPAN5 citations60