Inventor
WON YOO-KEUN
KR3 patents
Patents
3 patentsUS6487472B1Nov 26, 2002
Semiconductor device manufacturing facility with a diagnosis system
SAMSUNG ELECTRONICS CO LTD36 citations89
US7196774B2Mar 27, 2007
Lithography device
SAMSUNG ELECTRONICS CO LTD10 citations82
US7505494B2Mar 17, 2009
System and method for controlling wavelength of a laser beam
SAMSUNG ELECTRONICS CO LTD2 citations55