Inventor
CHEN CHUNG-AN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHUNG-AN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
3 patentsUS7288461B2Oct 30, 2007
Method of forming interconnect having stacked alignment mark
UNITED MICROELECTRONICS CORP14 citations81
US7288836B2Oct 30, 2007
Stacked alignment mark and method for manufacturing thereof
UNITED MICROELECTRONICS CORP7 citations71
US7524595B2Apr 28, 2009
Process for forming anti-reflection coating and method for improving accuracy of overlay measurement and alignment
UNITED MICROELECTRONICS CORP0 citations44