Inventor

YONEKAWA MASAMI

JP20 patents

⚠️ This page may combine multiple inventors who share the name “YONEKAWA MASAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YONEKAWA MASAMI

CANON KK

Projection exposure apparatus with an aberration compensation device of a projection lens

Projection aligner and projection aligning method

Projection optical system, exposure apparatus and semiconductor-device manufacturing method using the system

Exposure apparatus and its control method, stage apparatus, and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus and its control method, stage apparatus, and device manufacturing method

Container, processing apparatus, particle removing method, and method of manufacturing article

Exposure apparatus and control method for correcting an exposure optical system on the basis of an estimated magnification variation

Projection exposure apparatus which determines the minimum number of shots to optimially expose the substrate surface

Imprint apparatus, method of operating the same, and method of manufacturing article

Lithography apparatus and article manufacturing method

Exposure apparatus and original

Evaluation method, substrate processing apparatus, manufacturing method of substrate processing apparatus and article manufacturing method

Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers

Apparatus and method for removing contaminant on original, method of manufacturing device, and original

Particle removal method, particle removal apparatus, and method for manufacturing article

Reflective original, exposure method, and device manufacturing method

Lithography apparatus and method of manufacturing article

Imprint apparatus, method for manufacturing article, and exposure apparatus

YONEKAWA MASAMI

Trapping device that traps particles in vacuum atmosphere