Inventor
EDO RYO
JP9 patents
Patents
9 patentsUS5800949ASep 1, 1998
Mask, method of producing a device using the mask and aligner with the mask
CANON KK25 citations92
US7024266B2Apr 4, 2006
Substrate processing apparatus, method of controlling substrate, and exposure apparatus
CANON KK22 citations91
US5225686AJul 6, 1993
Positioning method and positioning mechanism for use in exposure apparatus
CANON KK21 citations91
US7276097B2Oct 2, 2007
Load-lock system, exposure processing system, and device manufacturing method
CANON KK13 citations82
US6805748B1Oct 19, 2004
Substrate processing system with load-lock chamber
CANON KK14 citations82
US7236229B2Jun 26, 2007
Load lock chamber, processing system
CANON KK7 citations72
US7670754B2Mar 2, 2010
Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers
CANON KK5 citations62
US7319507B2Jan 15, 2008
Apparatus and method for removing contaminant on original, method of manufacturing device, and original
CANON KK2 citations62
US7656507B2Feb 2, 2010
Processing unit, exposure apparatus having the processing unit, and protection unit
CANON KK0 citations40