Inventor
GOTOU KENTAROU
JP7 patents
Patents
7 patentsUS11681222B2Jun 20, 2023
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations61
US11036133B2Jun 15, 2021
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations61
US7335457B2Feb 26, 2008
Positive-tone radiation-sensitive resin composition
JSR CORP2 citations61
US10620534B2Apr 14, 2020
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations51
US10082733B2Sep 25, 2018
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations51
US9500950B2Nov 22, 2016
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations51
US9213236B2Dec 15, 2015
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations51