Inventor
KUROSAKI TOSHIEI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “KUROSAKI TOSHIEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
29 patentsUS4480910ANov 6, 1984
Pattern forming apparatus
HITACHI LTD1,548 citations98
US6476388B1Nov 5, 2002
Scanning electron microscope having magnification switching control
HITACHI LTD95 citations97
US5235400AAug 10, 1993
Method of and apparatus for detecting defect on photomask
HITACHI LTD77 citations96
US4992825AFeb 12, 1991
Method of forming pattern and projection aligner for carrying out the same
HITACHI LTD39 citations96
US4983039AJan 8, 1991
Spectrometer
HITACHI LTD66 citations96
US4904569AFeb 27, 1990
Method of forming pattern and projection aligner for carrying out the same
HITACHI LTD64 citations96
US4869999ASep 26, 1989
Method of forming pattern and projection aligner for carrying out the same
HITACHI LTD81 citations96
US4441206AApr 3, 1984
Pattern detecting apparatus
HITACHI LTD79 citations96
US7113628B1Sep 26, 2006
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
HITACHI LTD54 citations95
US4057347ANov 8, 1977
Optical exposure apparatus
HITACHI LTD56 citations95
US4798470AJan 17, 1989
Pattern printing method and apparatus
HITACHI LTD37 citations93
US6792359B2Sep 14, 2004
Method for inspecting defect and system therefor
HITACHI LTD29 citations92
US6553323B1Apr 22, 2003
Method and its apparatus for inspecting a specimen
HITACHI LTD21 citations92
US5747816AMay 5, 1998
Charged particle beam apparatus
HITACHI LTD24 citations92
US4614432ASep 30, 1986
Pattern detector
HITACHI LTD32 citations92
US4504726AMar 12, 1985
Pattern generator
HITACHI LTD35 citations92
US4857744AAug 15, 1989
Optical projection printing apparatus wherein wafer mark has a grating pitch in the sagittal plane of the first optical system
HITACHI LTD22 citations82
US7010447B2Mar 7, 2006
Method for inspecting defect and system therefor
HITACHI LTD6 citations74
USRE36731EJun 13, 2000
Method of forming pattern and projection aligner for carrying out the same
HITACHI LTD12 citations74
US5392115AFeb 21, 1995
Method of detecting inclination of a specimen and a projection exposure device as well as method of detecting period of periodically varying signal
HITACHI LTD10 citations74
US5078495AJan 7, 1992
Monochromator
HITACHI LTD16 citations74
US4477183AOct 16, 1984
Automatic focusing apparatus
HITACHI LTD8 citations74
US4380395AApr 19, 1983
Reduction projection aligner system
HITACHI LTD9 citations74
US4317383AMar 2, 1982
Proportional linear output system
HITACHI LTD8 citations73
US5247329ASep 21, 1993
Projection type exposure method and apparatus
HITACHI LTD19 citations72
US4597669AJul 1, 1986
Pattern detector
HITACHI LTD2 citations63
US7558683B2Jul 7, 2009
Method for inspecting defect and system therefor
HITACHI LTD0 citations52
US7356177B2Apr 8, 2008
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
HITACHI LTD0 citations52
US7305314B2Dec 4, 2007
Method for inspecting defect and system therefor
HITACHI LTD0 citations52