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Inventor
HAMAISHI SATORU
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “HAMAISHI SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patents
US10109461B2
Oct 23, 2018
Plasma processing method
TOKYO ELECTRON LTD
41 citations
93
US9734992B2
Aug 15, 2017
Plasma processing apparatus
TOKYO ELECTRON LTD
43 citations
93
DAIHEN CORP
2 patents
US11769651B2
Sep 26, 2023
High-frequency power supply device and output method of high-frequency power
DAIHEN CORP
2 citations
64
US7615983B2
Nov 10, 2009
High frequency power device for protecting an amplifying element therein
DAIHEN CORP
3 citations
57
NAKAMORI YUYA
1 patent
US8674619B2
Mar 18, 2014
High frequency power supply device
NAKAMORI YUYA
3 citations
49