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Inventor
SEI KAZUTAKA
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “SEI KAZUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
1 patent
US9640368B2
May 2, 2017
Plasma processing apparatus
TOKYO ELECTRON LTD
11 citations
78
DAIHEN CORP
1 patent
US7615983B2
Nov 10, 2009
High frequency power device for protecting an amplifying element therein
DAIHEN CORP
3 citations
57