Inventor
TADA YOSHIHIDE
JP11 patents
⚠️ This page may combine multiple inventors who share the name “TADA YOSHIHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS6897149B2May 24, 2005
Method of producing electronic device material
TOKYO ELECTRON LTD24 citations92
US7446052B2Nov 4, 2008
Method for forming insulation film
TOKYO ELECTRON LTD10 citations82
US6821566B2Nov 23, 2004
Method and apparatus for forming insulating film containing silicon oxy-nitride
TOKYO ELECTRON LTD15 citations81
US7217659B2May 15, 2007
Process for producing materials for electronic device
TOKYO ELECTRON LTD5 citations73
US8021987B2Sep 20, 2011
Method of modifying insulating film
TOKYO ELECTRON LTD3 citations62
US7662236B2Feb 16, 2010
Method for forming insulation film
TOKYO ELECTRON LTD3 citations62
US7655574B2Feb 2, 2010
Method of modifying insulating film
TOKYO ELECTRON LTD3 citations62
US7622402B2Nov 24, 2009
Method for forming underlying insulation film
TOKYO ELECTRON LTD2 citations62
US6933249B2Aug 23, 2005
Method of fabricating semiconductor device
TOKYO ELECTRON LTD3 citations61