Inventor
MAITY NIRMALYA
US15 patents
⚠️ This page may combine multiple inventors who share the name “MAITY NIRMALYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS7211508B2May 1, 2007
Atomic layer deposition of tantalum based barrier materials
APPLIED MATERIALS INC139 citations99
US6350353B2Feb 26, 2002
Alternate steps of IMP and sputtering process to improve sidewall coverage
APPLIED MATERIALS INC175 citations99
US7595263B2Sep 29, 2009
Atomic layer deposition of barrier materials
APPLIED MATERIALS INC68 citations98
US7524762B2Apr 28, 2009
Atomic layer deposition of tantalum-containing materials using the tantalum precursor TAIMATA
APPLIED MATERIALS INC61 citations98
US7264846B2Sep 4, 2007
Ruthenium layer formation for copper film deposition
APPLIED MATERIALS INC87 citations98
US7241686B2Jul 10, 2007
Atomic layer deposition of tantalum-containing materials using the tantalum precursor TAIMATA
APPLIED MATERIALS INC89 citations98
US7049226B2May 23, 2006
Integration of ALD tantalum nitride for copper metallization
APPLIED MATERIALS INC514 citations98
US6841050B2Jan 11, 2005
Small planetary magnetron
APPLIED MATERIALS INC36 citations91
US7169271B2Jan 30, 2007
Magnetron executing planetary motion adjacent a sputtering target
APPLIED MATERIALS INC11 citations82
US7691742B2Apr 6, 2010
Atomic layer deposition of tantalum-containing materials using the tantalum precursor TAIMATA
APPLIED MATERIALS INC2 citations63
US7807030B2Oct 5, 2010
Small scanned magentron
APPLIED MATERIALS INC4 citations61
US12094726B2Sep 17, 2024
Adapting electrical, mechanical, and thermal properties of package substrates
APPLIED MATERIALS INC0 citations49
US12001193B2Jun 4, 2024
Apparatus for environmental control of dies and substrates for hybrid bonding
APPLIED MATERIALS INC0 citations47