Inventor

BUTHERUS ALEXANDER D

US2 patents

⚠️ This page may combine multiple inventors who share the name “BUTHERUS ALEXANDER D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BELL TELEPHONE LABOR INC

1 patent

US4403241ASep 6, 1983

Method for etching III-V semiconductors and devices made by this method

BELL TELEPHONE LABOR INC15 citations68

AT & T BELL LAB

1 patent

US4569718AFeb 11, 1986

Method for plasma etching III-V semiconductors with a BCl3 -Cl2 gas

AT & T BELL LAB3 citations57