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Inventor
NGAI SAMUEL
US
2 patents
Patents
2 patents
US7709794B2
May 4, 2010
Defect detection using time delay lock-in thermography (LIT) and dark field LIT
KLA TENCOR CORP
23 citations
88
US8023110B1
Sep 20, 2011
Priori crack detection in solar photovoltaic wafers by detecting bending at edges of wafers
KLA TENCOR CORP
10 citations
80