Inventor

ETO TAKANORI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “ETO TAKANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US11688650B2Jun 27, 2023

Etching method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations43

US11810792B2Nov 7, 2023

Etching method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations38

TOSHIBA KK

1 patent

US9318207B2Apr 19, 2016

Nonvolatile semiconductor memory device and method of operating the same

TOSHIBA KK0 citations36