Inventor
GEALY DAN
US45 patents
⚠️ This page may combine multiple inventors who share the name “GEALY DAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
39 patentsUS6518610B2Feb 11, 2003
Rhodium-rich oxygen barriers
MICRON TECHNOLOGY INC104 citations99
US6566147B2May 20, 2003
Method for controlling deposition of dielectric films
MICRON TECHNOLOGY INC98 citations98
US6797337B2Sep 28, 2004
Method for delivering precursors
MICRON TECHNOLOGY INC60 citations96
US6492241B1Dec 10, 2002
Integrated capacitors fabricated with conductive metal oxides
MICRON TECHNOLOGY INC64 citations96
US6458645B2Oct 1, 2002
Capacitor having tantalum oxynitride film and method for making same
MICRON TECHNOLOGY INC41 citations96
US7311947B2Dec 25, 2007
Laser assisted material deposition
MICRON TECHNOLOGY INC19 citations93
US6962824B2Nov 8, 2005
Method for controlling deposition of dielectric films
MICRON TECHNOLOGY INC21 citations93
US6864527B2Mar 8, 2005
Capacitor having tantalum oxynitride film and method for making same
MICRON TECHNOLOGY INC18 citations93
US6838293B2Jan 4, 2005
Method for controlling deposition of dielectric films
MICRON TECHNOLOGY INC22 citations93
US6525365B1Feb 25, 2003
Dielectric films and capacitor structures including same
MICRON TECHNOLOGY INC24 citations93
US6444478B1Sep 3, 2002
Dielectric films and methods of forming same
MICRON TECHNOLOGY INC27 citations93
US6316800B1Nov 13, 2001
Boride electrodes and barriers for cell dielectrics
MICRON TECHNOLOGY INC17 citations93
US6111285AAug 29, 2000
Boride electrodes and barriers for cell dielectrics
MICRON TECHNOLOGY INC17 citations93
US6869877B2Mar 22, 2005
Integrated capacitors fabricated with conductive metal oxides
MICRON TECHNOLOGY INC17 citations92
US6677640B1Jan 13, 2004
Memory cell with tight coupling
MICRON TECHNOLOGY INC28 citations92
US7009240B1Mar 7, 2006
Structures and methods for enhancing capacitors in integrated circuits
MICRON TECHNOLOGY INC12 citations84
US9484196B2Nov 1, 2016
Semiconductor structures including liners comprising alucone and related methods
MICRON TECHNOLOGY INC10 citations82
US7390712B2Jun 24, 2008
Methods of enhancing capacitors in integrated circuits
MICRON TECHNOLOGY INC4 citations74
US7206215B2Apr 17, 2007
Antifuse having tantalum oxynitride film and method for making same
MICRON TECHNOLOGY INC9 citations74
US7118783B2Oct 10, 2006
Methods and apparatus for vapor processing of micro-device workpieces
MICRON TECHNOLOGY INC10 citations74
US7038263B2May 2, 2006
Integrated circuits with rhodium-rich structures
MICRON TECHNOLOGY INC4 citations74
US7038265B2May 2, 2006
Capacitor having tantalum oxynitride film and method for making same
MICRON TECHNOLOGY INC4 citations74
US6781175B2Aug 24, 2004
Rhodium-rich integrated circuit capacitor electrode
MICRON TECHNOLOGY INC6 citations74
US6740554B2May 25, 2004
Methods to form rhodium-rich oxygen barriers
MICRON TECHNOLOGY INC5 citations74
US6518121B2Feb 11, 2003
Boride electrodes and barriers for cell dielectrics
MICRON TECHNOLOGY INC9 citations74
US6940112B2Sep 6, 2005
Integrated capacitors fabricated with conductive metal oxides
MICRON TECHNOLOGY INC9 citations73
US7560392B2Jul 14, 2009
Electrical components for microelectronic devices and methods of forming the same
MICRON TECHNOLOGY INC6 citations72
US8012532B2Sep 6, 2011
Methods of making crystalline tantalum pentoxide
MICRON TECHNOLOGY INC2 citations63
US7232721B2Jun 19, 2007
Structures and methods for enhancing capacitors in integrated circuits
MICRON TECHNOLOGY INC2 citations63
US7176079B2Feb 13, 2007
Method of fabricating a semiconductor device with a wet oxidation with steam process
MICRON TECHNOLOGY INC2 citations63
US7022623B2Apr 4, 2006
Method of fabricating a semiconductor device with a dielectric film using a wet oxidation with steam process
MICRON TECHNOLOGY INC2 citations63
US11223014B2Jan 11, 2022
Semiconductor structures including liners comprising alucone and related methods
MICRON TECHNOLOGY INC1 citations61
US7968969B2Jun 28, 2011
Electrical components for microelectronic devices
MICRON TECHNOLOGY INC2 citations61
US8900992B2Dec 2, 2014
Methods of forming a ruthenium material, methods of forming a capacitor, and related electronic systems
MICRON TECHNOLOGY INC0 citations52
US8378430B2Feb 19, 2013
Transistors having argon gate implants and methods of forming the same
MICRON TECHNOLOGY INC0 citations52
US7584942B2Sep 8, 2009
Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers
MICRON TECHNOLOGY INC1 citations52
US7241661B2Jul 10, 2007
Method of forming a coupling dielectric Ta2O5 in a memory device
MICRON TECHNOLOGY INC0 citations52
US7064052B2Jun 20, 2006
Method of processing a transistor gate dielectric film with stem
MICRON TECHNOLOGY INC0 citations52
US6949477B2Sep 27, 2005
Method of fabricating a capacitive element for a semiconductor device
MICRON TECHNOLOGY INC0 citations52
GEALY DAN
2 patentsBHAT VISHWANATH
2 patentsDANDO ROSS S
2 patentsUS8133554B2Mar 13, 2012
Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces
DANDO ROSS S2 citations62
US9023436B2May 5, 2015
Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces
DANDO ROSS S0 citations51