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Inventor
WANG NING-YI NEIL
US
2 patents
⚠️ This page may combine multiple inventors who share the name “WANG NING-YI NEIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KWAK HIDONG
1 patent
US8830486B2
Sep 9, 2014
Atmospheric molecular contamination control with local purging
KWAK HIDONG
6 citations
75
KLA TENCOR CORP
1 patent
US9110020B2
Aug 18, 2015
Atmospheric molecular contamination control with local purging
KLA TENCOR CORP
0 citations
45