Inventor
LAMB JASON MICHAEL
US2 patents
Patents
2 patentsUS10858735B2Dec 8, 2020
Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
APPLIED MATERIALS INC0 citations46
US10435786B2Oct 8, 2019
Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
APPLIED MATERIALS INC0 citations46