Inventor
GRAUPNER PAUL
DE7 patents
⚠️ This page may combine multiple inventors who share the name “GRAUPNER PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS7433015B2Oct 7, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV39 citations96
US7545481B2Jun 9, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations95
US7715107B2May 11, 2010
Optical element for correction of aberration, and a lithographic apparatus comprising same
ASML NETHERLANDS BV21 citations92