Inventor
BASEMAN ROBERT J
US24 patents
⚠️ This page may combine multiple inventors who share the name “BASEMAN ROBERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
13 patentsUS5346518ASep 13, 1994
Vapor drain system
IBM114 citations97
US5093279AMar 3, 1992
Laser ablation damascene process
IBM101 citations94
US10365640B2Jul 30, 2019
Controlling multi-stage manufacturing process based on internet of things (IoT) sensors and cognitive rule induction
IBM6 citations84
US5134038AJul 28, 1992
Thin film magnetic recording medium with controlled grain morphology and topology
IBM21 citations81
US5053250AOct 1, 1991
Thin film magnetic medium with controlled grain morphology and topology for improved performance
IBM12 citations74
US11022965B2Jun 1, 2021
Controlling multi-stage manufacturing process based on internet of things (IOT) sensors and cognitive rule induction
IBM1 citations73
US9299623B2Mar 29, 2016
Run-to-run control utilizing virtual metrology in semiconductor manufacturing
IBM3 citations72
US7650251B2Jan 19, 2010
System and method for rule-based data mining and problem detection for semiconductor fabrication
IBM6 citations72
US7539585B2May 26, 2009
System and method for rule-based data mining and problem detection for semiconductor fabrication
IBM7 citations72
US10585425B2Mar 10, 2020
Controlling multi-stage manufacturing process based on internet of things (IOT) sensors and cognitive rule induction
IBM0 citations52
US9915942B2Mar 13, 2018
System and method for identifying significant and consumable-insensitive trace features
IBM1 citations51
US8639375B2Jan 28, 2014
Enhancing investigation of variability by inclusion of similar objects with known differences to the original ones
IBM0 citations51
US12197133B2Jan 14, 2025
Tool control using multistage LSTM for predicting on-wafer measurements
IBM0 citations50
BASEMAN ROBERT J
8 patentsUS8793106B2Jul 29, 2014
Continuous prediction of expected chip performance throughout the production lifecycle
BASEMAN ROBERT J3 citations61
US8732627B2May 20, 2014
Method and apparatus for hierarchical wafer quality predictive modeling
BASEMAN ROBERT J3 citations61
US8328950B2Dec 11, 2012
Foreign material contamination detection
BASEMAN ROBERT J4 citations61
US8594821B2Nov 26, 2013
Detecting combined tool incompatibilities and defects in semiconductor manufacturing
BASEMAN ROBERT J2 citations60
US8874252B2Oct 28, 2014
Comprehensive analysis of queue times in microelectronic manufacturing
BASEMAN ROBERT J0 citations51
US8718809B2May 6, 2014
Comprehensive analysis of queue times in microelectronic manufacturing
BASEMAN ROBERT J0 citations51
US8533635B2Sep 10, 2013
Rule-based root cause and alias analysis for semiconductor manufacturing
BASEMAN ROBERT J1 citations50
US8315729B2Nov 20, 2012
Enhancing investigation of variability by inclusion of similar objects with known differences to the original ones
BASEMAN ROBERT J1 citations50