Inventor
TICKNOR ADAM D
US10 patents
⚠️ This page may combine multiple inventors who share the name “TICKNOR ADAM D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS6492238B1Dec 10, 2002
Bipolar transistor with raised extrinsic base fabricated in an integrated BiCMOS circuit
IBM45 citations95
US6500054B1Dec 31, 2002
Chemical-mechanical polishing pad conditioner
IBM51 citations92
US6325696B1Dec 4, 2001
Piezo-actuated CMP carrier
IBM50 citations91
US5267418ADec 7, 1993
Confined water fixture for holding wafers undergoing chemical-mechanical polishing
IBM36 citations91
US6667521B2Dec 23, 2003
Bipolar transistor with raised extrinsic base fabricated in an integrated BiCMOS circuit
IBM15 citations83
US6296717B1Oct 2, 2001
Regeneration of chemical mechanical polishing pads in-situ
IBM12 citations73
US8920567B2Dec 30, 2014
Post metal chemical-mechanical planarization cleaning process
IBM3 citations55
US7556972B2Jul 7, 2009
Detection and characterization of SiCOH-based dielectric materials during device fabrication
IBM0 citations48