Inventor
YOO KWANG SU
KR5 patents
Patents
5 patentsUS12522924B2Jan 13, 2026
Substrate processing device
JUSUNG ENG CO LTD0 citations53
US11488809B2Nov 1, 2022
Substrate processing apparatus
JUSUNG ENG CO LTD1 citations51
US12533706B2Jan 27, 2026
Gas supplying method using gas distributing unit
JUSUNG ENG CO LTD0 citations47
US12080526B2Sep 3, 2024
Substrate processing apparatus
JUSUNG ENG CO LTD0 citations44
US11551913B2Jan 10, 2023
Substrate processing apparatus
JUSUNG ENG CO LTD0 citations37