Inventor
CHETLUR SUNDAR SRINIVASAAN
US2 patents
Patents
2 patentsUS6328633B1Dec 11, 2001
Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method
AGERE SYST GUARDIAN CORP5 citations71
US6439972B2Aug 27, 2002
Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method
AGERE SYST GUARDIAN CORP5 citations60