Inventor
YOSHIDA SHOGO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIDA SHOGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
6 patentsUS10920764B2Feb 16, 2021
Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method
SCREEN HOLDINGS CO LTD3 citations69
US10923351B2Feb 16, 2021
Coating method
SCREEN HOLDINGS CO LTD0 citations62
US10593548B2Mar 17, 2020
Coating method
SCREEN HOLDINGS CO LTD0 citations52
US11404629B2Aug 2, 2022
Treating solution supply apparatus
SCREEN HOLDINGS CO LTD0 citations48
US11000783B2May 11, 2021
Pumping apparatus, treatment solution supplying device, and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations48
US10627836B2Apr 21, 2020
Pumping apparatus and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations39