Inventor
QUEK SER WEE SEBASTIAN
SG2 patents
Patents
2 patentsUS6245193B1Jun 12, 2001
Chemical mechanical polishing apparatus improved substrate carrier head and method of use
CHARTERED SEMICONDUCTOR MFG24 citations86
US6136710AOct 24, 2000
Chemical mechanical polishing apparatus with improved substrate carrier head and method of use
CHARTERED SEMICONDUCTOR MFG18 citations86