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Inventor
TSURUTA MIKI
JP
2 patents
Patents
2 patents
US8859183B2
Oct 14, 2014
N-acyl-β-lactam derivative, macromolecular compound, and photoresist composition
FUKUMOTO TAKASHI
0 citations
45
US8753794B2
Jun 17, 2014
N-acyl-β-lactam derivative, macromolecular compound, and photoresist composition
FUKUMOTO TAKASHI
0 citations
45