Inventor

DEBA YUICHI

JP3 patents

Patents

3 patents

US12478997B2Nov 25, 2025

Substrate processing method and substrate processing apparatus

SCREEN HOLDINGS CO LTD0 citations58

US12278083B2Apr 15, 2025

Substrate holder state detection device and substrate holder state detection method

SCREEN HOLDINGS CO LTD0 citations48

US12293492B2May 6, 2025

Substrate processing apparatus and monitoring method in substrate processing apparatus

SCREEN HOLDINGS CO LTD0 citations45