Inventor
CHAN CHIU
US19 patents
⚠️ This page may combine multiple inventors who share the name “CHAN CHIU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS8361906B2Jan 29, 2013
Ultra high selectivity ashable hard mask film
APPLIED MATERIALS INC63 citations96
US8993454B2Mar 31, 2015
Ultra high selectivity doped amorphous carbon strippable hardmask development and integration
APPLIED MATERIALS INC16 citations92
US6468136B1Oct 22, 2002
Tungsten CMP with improved alignment mark integrity, reduced edge residue, and reduced retainer ring notching
APPLIED MATERIALS INC30 citations92
US7867578B2Jan 11, 2011
Method for depositing an amorphous carbon film with improved density and step coverage
APPLIED MATERIALS INC12 citations84
US7922440B2Apr 12, 2011
Apparatus and method for centering a substrate in a process chamber
APPLIED MATERIALS INC6 citations63
US7514125B2Apr 7, 2009
Methods to improve the in-film defectivity of PECVD amorphous carbon films
APPLIED MATERIALS INC2 citations63
US11136665B2Oct 5, 2021
Shadow ring for modifying wafer edge and bevel deposition
APPLIED MATERIALS INC1 citations61
US7048607B1May 23, 2006
System and method for chemical mechanical planarization
APPLIED MATERIALS INC4 citations59