Inventor
LINDBERG ROBERT C
US18 patents
⚠️ This page may combine multiple inventors who share the name “LINDBERG ROBERT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
5 patentsUS9142379B2Sep 22, 2015
Ion source and a method for in-situ cleaning thereof
VARIAN SEMICONDUCTOR EQUIPMENT7 citations83
US7675047B2Mar 9, 2010
Technique for shaping a ribbon-shaped ion beam
VARIAN SEMICONDUCTOR EQUIPMENT9 citations82
US8884244B1Nov 11, 2014
Dual mode ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT4 citations73
US8993980B1Mar 31, 2015
Dual stage scanner for ion beam control
VARIAN SEMICONDUCTOR EQUIPMENT1 citations52
US9029811B1May 12, 2015
Apparatus to control an ion beam
VARIAN SEMICONDUCTOR EQUIPMENT0 citations42
APPLIED MATERIALS INC
5 patentsUSD956005SJun 28, 2022
Shaped electrode
APPLIED MATERIALS INC3 citations72
US11854760B2Dec 26, 2023
Crucible design for liquid metal in an ion source
APPLIED MATERIALS INC6 citations70
US11810746B2Nov 7, 2023
Variable thickness ion source extraction plate
APPLIED MATERIALS INC0 citations62
US11437215B2Sep 6, 2022
Electrostatic filter providing reduced particle generation
APPLIED MATERIALS INC0 citations62
US12191113B2Jan 7, 2025
Systems and methods for optimizing full horizontal scanned beam distance
APPLIED MATERIALS INC0 citations45
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS10504682B2Dec 10, 2019
Conductive beam optic containing internal heating element
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations73
US10714301B1Jul 14, 2020
Conductive beam optics for reducing particles in ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations62
US11049691B2Jun 29, 2021
Ion beam quality control using a movable mass resolving device
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations61