Inventor

KLOS LEO

US2 patents

⚠️ This page may combine multiple inventors who share the name “KLOS LEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US7276847B2Oct 2, 2007

Cathode assembly for indirectly heated cathode ion source

VARIAN SEMICONDUCTOR EQUIPMENT14 citations79

CHANEY CRAIG

1 patent

US9076625B2Jul 7, 2015

Indirectly heated cathode cartridge design

CHANEY CRAIG0 citations28