Inventor
LAM HYMAN W H
US10 patents
⚠️ This page may combine multiple inventors who share the name “LAM HYMAN W H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS9982343B2May 29, 2018
Apparatus for providing plasma to a process chamber
APPLIED MATERIALS INC3 citations72
US11749543B2Sep 5, 2023
Chamber matching and calibration
APPLIED MATERIALS INC2 citations67
USRE48994EMar 29, 2022
Apparatus and method for providing uniform flow of gas
APPLIED MATERIALS INC0 citations62
US11133155B2Sep 28, 2021
Apparatus for depositing metal films with plasma treatment
APPLIED MATERIALS INC0 citations62
US9017776B2Apr 28, 2015
Apparatuses and methods for atomic layer deposition
APPLIED MATERIALS INC1 citations61
US10640870B2May 5, 2020
Gas feedthrough assembly
APPLIED MATERIALS INC0 citations51
US10453657B2Oct 22, 2019
Apparatus for depositing metal films with plasma treatment
APPLIED MATERIALS INC0 citations51