Inventor
ARENA CHANTAL
US67 patents
⚠️ This page may combine multiple inventors who share the name “ARENA CHANTAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ARENA CHANTAL
20 patentsUS9048169B2Jun 2, 2015
Formation of substantially pit free indium gallium nitride
ARENA CHANTAL8 citations84
US8471243B1Jun 25, 2013
Photoactive devices with improved distribution of charge carriers, and methods of forming same
ARENA CHANTAL16 citations84
US8247314B2Aug 21, 2012
Methods for improving the quality of structures comprising semiconductor materials
ARENA CHANTAL7 citations84
US8154022B2Apr 10, 2012
Process for fabricating a structure for epitaxy without an exclusion zone
ARENA CHANTAL6 citations84
US8585820B2Nov 19, 2013
Abatement of reaction gases from gallium nitride deposition
ARENA CHANTAL6 citations83
US8388755B2Mar 5, 2013
Thermalization of gaseous precursors in CVD reactors
ARENA CHANTAL13 citations83
US8323407B2Dec 4, 2012
Gallium trichloride injection scheme
ARENA CHANTAL10 citations83
US8197597B2Jun 12, 2012
Gallium trichloride injection scheme
ARENA CHANTAL12 citations83
US9412580B2Aug 9, 2016
Methods for forming group III-nitride materials and structures formed by such methods
ARENA CHANTAL7 citations82
US8329565B2Dec 11, 2012
Methods for improving the quality of structures comprising semiconductor materials
ARENA CHANTAL9 citations81
US8574968B2Nov 5, 2013
Epitaxial methods and templates grown by the methods
ARENA CHANTAL12 citations80
US8836081B2Sep 16, 2014
Semiconductor structures, devices and engineered substrates including layers of semiconductor material having reduced lattice strain
ARENA CHANTAL1 citations63
US8765508B2Jul 1, 2014
Methods of fabricating semiconductor structures or devices using layers of semiconductor material having selected or controlled lattice parameters
ARENA CHANTAL3 citations63
US8692260B2Apr 8, 2014
Method of forming a composite laser substrate
ARENA CHANTAL2 citations63
US8278193B2Oct 2, 2012
Methods of forming layers of semiconductor material having reduced lattice strain, semiconductor structures, devices and engineered substrates including same
ARENA CHANTAL3 citations63
US8318612B2Nov 27, 2012
Methods for improving the quality of group III-nitride materials and structures produced by the methods
ARENA CHANTAL3 citations62
US8178427B2May 15, 2012
Epitaxial methods for reducing surface dislocation density in semiconductor materials
ARENA CHANTAL5 citations62
US8236593B2Aug 7, 2012
Methods for improving the quality of epitaxially-grown semiconductor materials
ARENA CHANTAL4 citations60
US9023721B2May 5, 2015
Methods of forming bulk III-nitride materials on metal-nitride growth template layers, and structures formed by such methods
ARENA CHANTAL3 citations59
US8598019B2Dec 3, 2013
Methods for improving the quality of structures comprising semiconductor materials
ARENA CHANTAL1 citations52
SOITEC SILICON ON INSULATOR
17 patentsUS7732306B2Jun 8, 2010
Methods for producing improved epitaxial materials
SOITEC SILICON ON INSULATOR25 citations90
US8367520B2Feb 5, 2013
Methods and structures for altering strain in III-nitride materials
SOITEC SILICON ON INSULATOR12 citations84
US7902045B2Mar 8, 2011
Process for fabricating a structure for epitaxy without an exclusion zone
SOITEC SILICON ON INSULATOR14 citations84
US8382898B2Feb 26, 2013
Methods for high volume manufacture of group III-V semiconductor materials
SOITEC SILICON ON INSULATOR10 citations83
US10014429B2Jul 3, 2018
Semiconductor structures including bonding layers, multi-junction photovoltaic cells and related methods
SOITEC SILICON ON INSULATOR13 citations82
US9246057B2Jan 26, 2016
Semiconductor structures having active regions comprising InGaN, methods of forming such semiconductor structures, and light emitting devices formed from such semiconductor structures
SOITEC SILICON ON INSULATOR5 citations82
US8642995B2Feb 4, 2014
Photoactive devices with improved distribution of charge carriers, and methods of forming same
SOITEC SILICON ON INSULATOR4 citations73
US9324911B2Apr 26, 2016
Methods of fabricating dilute nitride semiconductor materials for use in photoactive devices and related structures
SOITEC SILICON ON INSULATOR4 citations70
US9343626B2May 17, 2016
Semiconductor structures having active regions comprising InGaN, methods of forming such semiconductor structures, and light emitting devices formed from such semiconductor structures
SOITEC SILICON ON INSULATOR4 citations69
US9368344B2Jun 14, 2016
Semiconductor structures, devices and engineered substrates including layers of semiconductor material having reduced lattice strain
SOITEC SILICON ON INSULATOR1 citations63
US9038565B2May 26, 2015
Abatement of reaction gases from gallium nitride deposition
SOITEC SILICON ON INSULATOR3 citations62
US8887650B2Nov 18, 2014
Temperature-controlled purge gate valve for chemical vapor deposition chamber
SOITEC SILICON ON INSULATOR3 citations62
US8741385B2Jun 3, 2014
Thermalization of gaseous precursors in CVD reactors
SOITEC SILICON ON INSULATOR2 citations62
US8377802B2Feb 19, 2013
III-V semiconductor structures and methods for forming the same
SOITEC SILICON ON INSULATOR3 citations60
US9117955B2Aug 25, 2015
Semiconductor structures having active regions comprising ingan, methods of forming such semiconductor structures, and light emitting devices formed from such semiconductor structures
SOITEC SILICON ON INSULATOR3 citations59
US9793360B2Oct 17, 2017
Methods of fabricating semiconductor structures or devices using layers of semiconductor material having selected or controlled lattice parameters
SOITEC SILICON ON INSULATOR0 citations52
US9202741B2Dec 1, 2015
Metallic carrier for layer transfer and methods for forming the same
SOITEC SILICON ON INSULATOR0 citations52
ASM INC
6 patentsUS7816236B2Oct 19, 2010
Selective deposition of silicon-containing films
ASM INC42 citations94
US7785995B2Aug 31, 2010
Semiconductor buffer structures
ASM INC16 citations84
US7514372B2Apr 7, 2009
Epitaxial growth of relaxed silicon germanium layers
ASM INC9 citations84
US7452757B2Nov 18, 2008
Silicon-on-insulator structures and methods
ASM INC17 citations84
US7666799B2Feb 23, 2010
Epitaxial growth of relaxed silicon germanium layers
ASM INC3 citations62
US7427556B2Sep 23, 2008
Method to planarize and reduce defect density of silicon germanium
ASM INC5 citations62
TOKYO ELECTRON LTD
3 patentsUS5972790AOct 26, 1999
Method for forming salicides
TOKYO ELECTRON LTD24 citations92
US6090705AJul 18, 2000
Method of eliminating edge effect in chemical vapor deposition of a metal
TOKYO ELECTRON LTD19 citations90
US6121140ASep 19, 2000
Method of improving surface morphology and reducing resistivity of chemical vapor deposition-metal films
TOKYO ELECTRON LTD18 citations81
COMMISSARIAT ENERGIE ATOMIQUE
2 patentsWERKHOVEN CHRISTIAAN J
1 patentBERTRAM JR RONALD THOMAS
1 patentShowing the top 50 of 67 patents by PatentIndex Score.