Inventor
KUNIYOSHI SHINJI
JP28 patents
⚠️ This page may combine multiple inventors who share the name “KUNIYOSHI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
18 patentsUS4480910ANov 6, 1984
Pattern forming apparatus
HITACHI LTD1,548 citations98
US4441206AApr 3, 1984
Pattern detecting apparatus
HITACHI LTD79 citations96
US4057347ANov 8, 1977
Optical exposure apparatus
HITACHI LTD56 citations95
US5497331AMar 5, 1996
Semiconductor integrated circuit device fabrication method and its fabrication apparatus
HITACHI LTD46 citations92
US5115456AMay 19, 1992
Mask for exposing wafer with radiation and its exposing method
HITACHI LTD22 citations92
US4933565AJun 12, 1990
Method and apparatus for correcting defects of X-ray mask
HITACHI LTD43 citations92
US4925755AMay 15, 1990
Method of correcting defect in circuit pattern
HITACHI LTD40 citations92
US4614432ASep 30, 1986
Pattern detector
HITACHI LTD32 citations92
US4504726AMar 12, 1985
Pattern generator
HITACHI LTD35 citations92
US6479392B2Nov 12, 2002
Fabrication method for semiconductor integrated circuit devices and semiconductor integrated circuit device
HITACHI LTD30 citations91
US4690529ASep 1, 1987
Optical exposer
HITACHI LTD29 citations88
US6633072B2Oct 14, 2003
Fabrication method for semiconductor integrated circuit devices and semiconductor integrated circuit device
HITACHI LTD13 citations82
US4737973AApr 12, 1988
Crystal monochromator
HITACHI LTD15 citations74
US4719161AJan 12, 1988
Mask for X-ray lithography and process for producing the same
HITACHI LTD7 citations74
US4477183AOct 16, 1984
Automatic focusing apparatus
HITACHI LTD8 citations74
US4380395AApr 19, 1983
Reduction projection aligner system
HITACHI LTD9 citations74
US4597669AJul 1, 1986
Pattern detector
HITACHI LTD2 citations63
US4964146AOct 16, 1990
Pattern transistor mask and method of using the same
HITACHI LTD5 citations54
NIHON MICRONICS KK
9 patentsUS7629807B2Dec 8, 2009
Electrical test probe
NIHON MICRONICS KK31 citations91
US7924038B2Apr 12, 2011
Probe and electrical connecting apparatus using it
NIHON MICRONICS KK7 citations83
US7586321B2Sep 8, 2009
Electrical test probe and electrical test probe assembly
NIHON MICRONICS KK19 citations83
US7586316B2Sep 8, 2009
Probe board mounting apparatus
NIHON MICRONICS KK12 citations82
US7667472B2Feb 23, 2010
Probe assembly, method of producing it and electrical connecting apparatus
NIHON MICRONICS KK7 citations72
US7679389B2Mar 16, 2010
Probe for electrical test and electrical connecting apparatus using it
NIHON MICRONICS KK5 citations62
US7523539B2Apr 28, 2009
Method of manufacturing a probe
NIHON MICRONICS KK4 citations62
US7736690B2Jun 15, 2010
Method for manufacturing an electrical test probe
NIHON MICRONICS KK6 citations61
US7557593B2Jul 7, 2009
Probe for electrical test and probe assembly
NIHON MICRONICS KK3 citations61