P

Inventor

KUNIYOSHI SHINJI

JP28 patents
⚠️ This page may combine multiple inventors who share the name “KUNIYOSHI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

18 patents
US4480910ANov 6, 1984

Pattern forming apparatus

HITACHI LTD1,548 citations98
US4441206AApr 3, 1984

Pattern detecting apparatus

HITACHI LTD79 citations96
US4057347ANov 8, 1977

Optical exposure apparatus

HITACHI LTD56 citations95
US5497331AMar 5, 1996

Semiconductor integrated circuit device fabrication method and its fabrication apparatus

HITACHI LTD46 citations92
US5115456AMay 19, 1992

Mask for exposing wafer with radiation and its exposing method

HITACHI LTD22 citations92
US4933565AJun 12, 1990

Method and apparatus for correcting defects of X-ray mask

HITACHI LTD43 citations92
US4925755AMay 15, 1990

Method of correcting defect in circuit pattern

HITACHI LTD40 citations92
US4614432ASep 30, 1986

Pattern detector

HITACHI LTD32 citations92
US4504726AMar 12, 1985

Pattern generator

HITACHI LTD35 citations92
US6479392B2Nov 12, 2002

Fabrication method for semiconductor integrated circuit devices and semiconductor integrated circuit device

HITACHI LTD30 citations91
US4690529ASep 1, 1987

Optical exposer

HITACHI LTD29 citations88
US6633072B2Oct 14, 2003

Fabrication method for semiconductor integrated circuit devices and semiconductor integrated circuit device

HITACHI LTD13 citations82
US4737973AApr 12, 1988

Crystal monochromator

HITACHI LTD15 citations74
US4719161AJan 12, 1988

Mask for X-ray lithography and process for producing the same

HITACHI LTD7 citations74
US4477183AOct 16, 1984

Automatic focusing apparatus

HITACHI LTD8 citations74
US4380395AApr 19, 1983

Reduction projection aligner system

HITACHI LTD9 citations74
US4597669AJul 1, 1986

Pattern detector

HITACHI LTD2 citations63
US4964146AOct 16, 1990

Pattern transistor mask and method of using the same

HITACHI LTD5 citations54

NIHON MICRONICS KK

9 patents

RENESAS TECH CORP

1 patent