Inventor

PARIKH SUKETU ARUN

US25 patents

⚠️ This page may combine multiple inventors who share the name “PARIKH SUKETU ARUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PARIKH SUKETU ARUN

APPLIED MATERIALS INC

Method of forming self-aligned via

Method of forming self-aligned via

Apparatus for cost-effective conversion of unsupervised fault detection (FD) system to supervised FD system

Film stack for lithography applications

Atomic layer self aligned substrate processing and integrated toolset

Methods of modifying portions of layer stacks

Self-alignment etching of interconnect layers

Stacked transistor device

Methods of modifying portions of layer stacks

Self-alignment etching of interconnect layers

Integrated CMOS source drain formation with advanced control

Method of forming self-aligned via

Stacked transistor device

Atomic layer self aligned substrate processing and integrated toolset

Contact and interconnect metallization for solar cells

Method of forming damascene structure

Method of ultra thinning of wafer

Self-aligned wide backside power rail contacts to multiple transistor sources

Equipment cleaning apparatus and method

Low resistance and high reliability metallization module

Multi color stack for self aligned dual pattern formation for multi purpose device structures

PARIKH SUKETU ARUN

Method of forming an electronic device including forming a charge storage element in a trench of a workpiece

Factory level process and final product performance control system

Self aligned narrow storage elements for advanced memory device

SPANSION LLC

Self aligned narrow storage elements for advanced memory device