Inventor
SHU JEN
US11 patents
⚠️ This page may combine multiple inventors who share the name “SHU JEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6632478B2Oct 14, 2003
Process for forming a low dielectric constant carbon-containing film
APPLIED MATERIALS INC658 citations99
US8008208B2Aug 30, 2011
Method of cleaning and forming a negatively charged passivation layer over a doped region
APPLIED MATERIALS INC13 citations81
US9184333B2Nov 10, 2015
Contact and interconnect metallization for solar cells
APPLIED MATERIALS INC2 citations62
NAT SEMICONDUCTOR CORP
3 patentsUS6348421B1Feb 19, 2002
Dielectric gap fill process that effectively reduces capacitance between narrow metal lines using HDP-CVD
NAT SEMICONDUCTOR CORP54 citations96
US6383933B1May 7, 2002
Method of using organic material to enhance STI planarization or other planarization processes
NAT SEMICONDUCTOR CORP14 citations79
US6593615B1Jul 15, 2003
Dielectric gap fill process that effectively reduces capacitance between narrow metal lines using HDP-CVD
NAT SEMICONDUCTOR CORP7 citations73