Inventor
JEONG GYU-MIN
KR3 patents
Patents
3 patentsUS9927720B2Mar 27, 2018
Substrate target for in-situ lithography metrology, metrology method for in-situ lithography, and method of manufacturing integrated circuit device by using in-situ metrology
SAMSUNG ELECTRONICS CO LTD2 citations68
US12046631B2Jul 23, 2024
Semiconductor device including an element separation structure
SAMSUNG ELECTRONICS CO LTD0 citations60
US11552167B2Jan 10, 2023
Semiconductor device including an element separation structure
SAMSUNG ELECTRONICS CO LTD1 citations60