Inventor

KARYU MAKOTO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KARYU MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIBAURA MECHATRONICS CORP

2 patents

US9507251B2Nov 29, 2016

Method for manufacturing reflective mask and apparatus for manufacturing reflective mask

SHIBAURA MECHATRONICS CORP0 citations45

US10111313B2Oct 23, 2018

Plasma processing apparatus and plasma processing method

SHIBAURA MECHATRONICS CORP0 citations33

YOSHIMORI TOMOAKI

1 patent

US8702901B2Apr 22, 2014

Method for manufacturing reflective mask and apparatus for manufacturing reflective mask

YOSHIMORI TOMOAKI0 citations39