Inventor
IKEDA TAKENOBU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “IKEDA TAKENOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS6506674B2Jan 14, 2003
Method of manufacturing a semiconductor integrated circuit device
HITACHI LTD37 citations92
US6479392B2Nov 12, 2002
Fabrication method for semiconductor integrated circuit devices and semiconductor integrated circuit device
HITACHI LTD30 citations91
US6633072B2Oct 14, 2003
Fabrication method for semiconductor integrated circuit devices and semiconductor integrated circuit device
HITACHI LTD13 citations82
TOKYO ELECTRON LTD
3 patentsUS12437970B2Oct 7, 2025
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US11764034B2Sep 19, 2023
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US12476079B2Nov 18, 2025
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations44