P

Inventor

BINNS LEWIS A

GB5 patents
⚠️ This page may combine multiple inventors who share the name “BINNS LEWIS A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents
US7474401B2Jan 6, 2009

Multi-layer alignment and overlay target and measurement method

IBM38 citations95
US7473502B1Jan 6, 2009

Imaging tool calibration artifact and method

IBM52 citations91
US7876439B2Jan 25, 2011

Multi layer alignment and overlay target and measurement method

IBM8 citations83

AUSSCHNITT CHRISTOPHER P

2 patents
US8339605B2Dec 25, 2012

Multilayer alignment and overlay target and measurement method

AUSSCHNITT CHRISTOPHER P11 citations82
US8107079B2Jan 31, 2012

Multi layer alignment and overlay target and measurement method

AUSSCHNITT CHRISTOPHER P6 citations82