Inventor
MAO SHIAN WEI
TW10 patents
⚠️ This page may combine multiple inventors who share the name “MAO SHIAN WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS10361120B2Jul 23, 2019
Conductive feature formation and structure
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US11557512B2Jan 17, 2023
Wet cleaning with tunable metal recess for via plugs
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12394669B2Aug 19, 2025
Wet cleaning with tunable metal recess for via plugs
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12020981B2Jun 25, 2024
Conductive feature formation and structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11798843B2Oct 24, 2023
Conductive feature formation and structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10971396B2Apr 6, 2021
Conductive feature formation and structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10971628B2Apr 6, 2021
FinFET device with T-shaped fin
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10522662B1Dec 31, 2019
FinFET device with T-shaped fin and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10867844B2Dec 15, 2020
Wet cleaning with tunable metal recess for VIA plugs
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51