Inventor
GOHARA TAKESHI
JP2 patents
Patents
2 patentsUS9013009B2Apr 21, 2015
Method for producing high-purity lanthanum, high-purity lanthanum, sputtering target formed from high-purity lanthanum, and metal gate film having highy-purity lanthanum as main component
TAKAHATA MASAHIRO1 citations45
US9234257B2Jan 12, 2016
Production method for high-purity lanthanum, high-purity lanthanum, sputtering target composed of high-purity lanthanum, and metal gate film containing high-purity lanthanum as main component
TAKAHATA MASAHIRO1 citations43