Inventor
BLUMRICH FREDERIK
DE3 patents
Patents
3 patentsUS10670955B2Jun 2, 2020
Critical dimension variation correction in extreme ultraviolet lithography
ZEISS CARL SMT GMBH3 citations67
US10095101B2Oct 9, 2018
Critical dimension variation correction in extreme ultraviolet lithography
ZEISS CARL SMT GMBH2 citations67
US10055833B2Aug 21, 2018
Method and system for EUV mask blank buried defect analysis
ZEISS CARL SMT GMBH2 citations66