Inventor

BARDEN JOHN

US7 patents

Patents

7 patents

US8921147B2Dec 30, 2014

Method and apparatus providing multi-step deposition of thin film layer

FIRST SOLAR INC3 citations61

US10147838B2Dec 4, 2018

Vapor transport deposition method and system for material co-deposition

FIRST SOLAR INC1 citations60

US9490120B2Nov 8, 2016

Vapor transport deposition method and system for material co-deposition

FIRST SOLAR INC2 citations60

US12522911B2Jan 13, 2026

Systems and methods for vaporization and vapor distribution

FIRST SOLAR INC1 citations57

US9006020B2Apr 14, 2015

Method and system of providing dopant concentration control in different layers of a semiconductor device

FIRST SOLAR INC0 citations51

US9337376B2May 10, 2016

Method and apparatus providing multi-step deposition of thin film layer

FIRST SOLAR INC0 citations50

US10749068B2Aug 18, 2020

Vapor transport deposition method and system for material co-deposition

FIRST SOLAR INC0 citations49