Inventor

LATINSKY SERGEY

IL2 patents

Patents

2 patents

US9927375B2Mar 27, 2018

System and method for printability based inspection

APPLIED MATERIALS ISRAEL LTD0 citations44

US7856138B2Dec 21, 2010

System, method and computer software product for inspecting charged particle responsive resist

APPLIED MATERIALS ISRAEL LTD0 citations42