Inventor

OHNO AKIHITO

JP20 patents

⚠️ This page may combine multiple inventors who share the name “OHNO AKIHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OHNO AKIHITO

MITSUBISHI ELECTRIC CORP

Method for manufacturing nitride semiconductor stacked structure and semiconductor light-emitting device

Manufacturing method for silicon carbide epitaxial wafer and manufacturing method for silicon carbide semiconductor device

Method for manufacturing silicon carbide semiconductor device

Single-crystal 4H-SiC substrate

Method for production of a nitride semiconductor laminated structure and an optical semiconductor device

Method for manufacturing nitride semiconductor device

Semiconductor wafer, semiconductor device, and method for producing semiconductor device

SiC epitaxial wafer, method for manufacturing SiC epitaxial wafer, SiC device, and power conversion apparatus

Silicon carbide epitaxial wafer manufacturing method, silicon carbide semiconductor device manufacturing method and silicon carbide epitaxial wafer manufacturing apparatus

Silicon carbide epitaxial wafer manufacturing method, silicon carbide semiconductor device manufacturing method and silicon carbide epitaxial wafer manufacturing apparatus

Single-crystal 4H-SiC substrate

Method for manufacturing a single-crystal 4H—SiC substrate

Semiconductor device manufacturing method

Manufacturing method and apparatus for manufacturing silicon carbide epitaxial wafer

Manufacturing method of high electron mobility transistor

Method of manufacturing semiconductor light emitting device

Method of manufacturing semiconductor element

OHNO AKIHITO

Substrate support and semiconductor manufacturing apparatus

Nitride semiconductor light-emitting device

SHIGIHARA KIMIO

Semiconductor laser