Inventor
MIZOBE TAKUMA
JP4 patents
Patents
4 patentsUS10707075B2Jul 7, 2020
Semiconductor wafer, semiconductor device, and method for producing semiconductor device
MITSUBISHI ELECTRIC CORP1 citations61
US10950435B2Mar 16, 2021
SiC epitaxial wafer, method for manufacturing SiC epitaxial wafer, SiC device, and power conversion apparatus
MITSUBISHI ELECTRIC CORP1 citations60
US11948794B2Apr 2, 2024
Method of manufacturing silicon carbide epitaxial wafer
MITSUBISHI ELECTRIC CORP0 citations58
US9564315B1Feb 7, 2017
Manufacturing method and apparatus for manufacturing silicon carbide epitaxial wafer
MITSUBISHI ELECTRIC CORP1 citations50